it could be that a previous version of the driver wasn't removed fully or correctly and now some of the files are locked. Can you install again the version that you had installed before and then uninstall it. Then try again our latest version (3DxWare 10.2.0).
I was getting the same errors trying to uninstall 10.1.4 so used task manager to end the process then I got the message it was uninstalled successfully. Installed 10.2.0 and still got the same errors, again ended the process and the installation completed successfully and my space navigator is running fine.